非接触抵抗マッピングシステム
- 製品名
- 非接触抵抗マッピングシステム
- Contactless Resistivity Mapping System
- 型番
- EU-p-ut-SCAN
- メーカ
- Eurorad
製品概要
The EU-r-mt SCAN is a high performance instrument for the characterization of high resistivity semiconductor wafers. It operates without any physical contact with the wafer and no deposited conductive layer on it.