VCSEL製造用湿式酸化システム

製品名

VCSEL製造用湿式酸化システム

Wet Oxidation System for VCSEL Fabrication

型番

VIXEL-320

メーカ

California Scientific

製品概要

VIXEL-320 is a compact stand-alone lateral wet oxidation system intended for the fabrication of Vertical Cavity Surface Emitting Lasers. It is an atmospheric-pressure oxidation system with in-situ monitoring of oxide aperture formation. It accommodates single wafers of up to 150 mm (6″) in diameter.

特長

• ウェハーサイズ: 150mm(max)
• ウェーハーチャック径: 175mm(typ)

FEATURES

• Wafer Size: 150mm(max)
• Wafer Chuck Diameter: 175mm(typ)